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Conference Papers Year : 2006

Characterization and testing of MEMS nonlinearities


This article presents a technique for nonlinear devices characterization and testing by identification of the Volterra kernels. After presenting the concept of Volterra modeling, we present a CAT tool based on the Volterra modeling technique. Then we apply the technique for the case-studies of a nonlinear system and a purely nonlinear MEMS cantilever. By finding the Volterra kernels of each of the case-studies we show how they can be used for characterization and test. Through this work, we introduce and discuss the multi-level MLS stimulus generation and response processing necessary to calculate the Volterra kernels. The multi-level stimulus can be generated easily on-chip and the response processing can also be simplified to be implemented on-chip for the purpose of BIST. The use of pseudorandom testing for MEMS characterization has never been addressed in the past to the best of our knowledge.


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Dates and versions

hal-00522020 , version 1 (29-09-2010)


  • HAL Id : hal-00522020 , version 1


A. Dhayni, Salvador Mir, Libor Rufer, Ahcène Bounceur. Characterization and testing of MEMS nonlinearities. International Design and Test (IDT'06), Nov 2006, United Arab Emirates. pp.0. ⟨hal-00522020⟩
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