Characterization and testing of MEMS nonlinearities

Abstract : This article presents a technique for nonlinear devices characterization and testing by identification of the Volterra kernels. After presenting the concept of Volterra modeling, we present a CAT tool based on the Volterra modeling technique. Then we apply the technique for the case-studies of a nonlinear system and a purely nonlinear MEMS cantilever. By finding the Volterra kernels of each of the case-studies we show how they can be used for characterization and test. Through this work, we introduce and discuss the multi-level MLS stimulus generation and response processing necessary to calculate the Volterra kernels. The multi-level stimulus can be generated easily on-chip and the response processing can also be simplified to be implemented on-chip for the purpose of BIST. The use of pseudorandom testing for MEMS characterization has never been addressed in the past to the best of our knowledge.
Keywords : MEMS testing
Type de document :
Communication dans un congrès
International Design and Test (IDT'06), Nov 2006, United Arab Emirates. pp.0, 2006
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Contributeur : Ahcène Bounceur <>
Soumis le : mercredi 29 septembre 2010 - 13:14:14
Dernière modification le : mercredi 16 mai 2018 - 18:30:04


  • HAL Id : hal-00522020, version 1



A. Dhayni, Salvador Mir, L. Rufer, A. Bounceur. Characterization and testing of MEMS nonlinearities. International Design and Test (IDT'06), Nov 2006, United Arab Emirates. pp.0, 2006. 〈hal-00522020〉



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