Jean-François Bernigaud 1, 2Author
Noham Martin 1, 2AuthorPersonId : 865055
Paul Laurent 1, 2AuthorPersonId : 848830
Cédric Quendo 1, 2AuthorPersonId : 8885 IdHAL : cedric-quendo
Gérard Tanné 1, 2AuthorPersonId : 11682 IdHAL : gerard-tanneORCID : 0000-0002-9050-0839IdRef : 164476881
Bernard Della 2AuthorPersonId : 842626
Fabrice Huret 1, 2AuthorPersonId : 835018
Philippe Gelin 1, 2Author
Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics
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